A model for chemically-induced mechanical loading on MEMS
نویسندگان
چکیده
منابع مشابه
A model for chemically-induced mechanical loading on MEMS
The development of full displacement field measurements as an alternative to the optical lever technique to measure the mechanical response for MEMS components in their environment calls for a modeling of chemically-induced mechanical fields (i.e., stress, strain, and displacements). As these phenomena usually arise from species adsorption, adsorbate modification or surface reconstruction, they...
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ژورنال
عنوان ژورنال: Journal of Mechanics of Materials and Structures
سال: 2007
ISSN: 1559-3959
DOI: 10.2140/jomms.2007.2.1787